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* PDF α Ͻñ ٶϴ. |
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/ȣ |
1997 / ȣ: V.9,no.5,Oct |
1() |
Sputtering Ȳ ̷ |
2(Ÿ) |
The Present States and Prospect of Sputtering Finishing |
() |
Koo, Kang (School of Textiles, Yeungnam University, Kyongsan, 712-749 Korea) |
(Ÿ) |
Koo, Kang (School of Textiles, Yeungnam University, Kyongsan, 712-749 Korea) |
Ҽ() |
Koo, Kang (School of Textiles, Yeungnam University, Kyongsan, 712-749 Korea) |
Ҽ(Ÿ) |
Koo, Kang (School of Textiles, Yeungnam University, Kyongsan, 712-749 Korea) |
/
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88 ~ 95 : 8 |
() |
Korean |
ʷ |
Ϸ ̹ 20 ̾, Osaka 1ȸ ձ Ȱ, 忡 , , νǸŭ ȭ.ڵȭǰ, water jet, air jet 꼺 ġ õǾ ־. ġ ã ִ ߿ NASA plasma óġ ġ 1 panel õǾ ־. ̳ ߿ ó ̶ Ͽ ǥ鿡 , level ڸ óؾϴ Ϳ λ Ҵ. Shizuoka Inagaki plasma , plasma ź Ǿ. |
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Reference |
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