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 년도별 목차보기 |
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| 발행년도/권호 |
2005 년 / 권호: V.17,no.4,Aug |
| 논문제목1(원어) |
기능성 고분자막을 이용한 반도체 공정 세정액의 분리정제특성 (Ⅱ) |
| 논문제목2(타언어) |
Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using
High Performance Polymer Membranes (Ⅱ) |
| 저자(원어) |
이재달1․홍영기․노덕길․배기서 |
| 저자(타언어) |
Jae-Dal Lee1, Young-Ki Hong, Duck-Kil Ro, and Kie-Seo Bae |
| 소속(원어) |
혜전대학 패션섬유과, (주)선진인더스트리, 청운대학교 패션디자인섬유공학과, 충남대학교 섬유공 |
| 소속(타언어) |
Hyejeon Junior College, Sun Jin, Inc.,Chungwoon Univ.,Chungnam National University |
| 시작/끝
페이지 |
21 ~ 26 총페이지 : 6 |
| 언어(원어) |
Korean |
| 초록 |
A combination separation system is composed of three parts, simple microfiltration unit for the
pretreatment of real waste IPA, pervaporation unit with plate and frame type module(the effective
membrane area 9,040㎠), and simple ultrafiltration unit as a refiner. Ultrafiltration module with hollow
fiber membrane(MWCO 10,000) used to purify waste aqueous IPA solution.
In addition, the flux of CMPA-K+ composite membrane for waste aqueous IPA solution was very
steady-state with long experiment time(30 days). And the standard deviation(σ) was 0.152 and then the
coefficient of variation(CV%)was 10.82
The IPA concentration on the membrane performance using pervaporation module system could be
increased from 89.85wt% to more than 99.90wt% in about 8hr at operation temperature of 70℃ using the
pervaporation module system.
Therefore, a combination separation process system of simple filtration and pervaporation was very effective
for the purpose of the IPA purification and reuse from industrial electronic components cleaning process. |
| 키워드 |
Pervaporation module, Iso-propyl alcohol(IPA), Dehydration, Total flux |
| 학회지 |
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| Reference |
http://www.koreascience.or.kr/article/ArticleFullRecord.jsp?cn=OSGGBT_2005_v17n4s83_21 |
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