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 년도별 목차보기 |
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| 발행년도/권호 |
2005 년 / 권호: V.17,no.3,Jun |
| 논문제목1(원어) |
기능성 고분자막을 이용한 반도체 공정 세정액의 분리정제특성 (Ⅰ) |
| 논문제목2(타언어) |
Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using
High Performance Polymer Membranes (Ⅰ) |
| 저자(원어) |
이재달ㆍ홍영기ㆍ노덕길ㆍ배기서 |
| 저자(타언어) |
1Jae-Dal Lee, Young-Ki Hong, Duck-Kil Ro, and Kie-Seo Bae |
| 소속(원어) |
혜전대학 패션섬유과, (주)선진인더스트리, 청운대학교 패션디자인섬유공학과, 충남대학교 섬유공학과 |
| 소속(타언어) |
Hyejeon Junior College, Sun Jin, Chungwoon Univ., Chungnam National University |
| 시작/끝
페이지 |
34 ~ 42 총페이지 : 9 |
| 언어(원어) |
Korean |
| 초록 |
In this work, a practical separation performance was investigated on aqueous alcohol solutions,
especially for iso-propyl alcohol (IPA), which is usually used during the semi- conductor rinsing process. The
removal of various substances from waste aqueous IPA solutions was carried out by microfiltration with 0.1～1㎛
pore size of mean diameter as a pre-filter.
Permeability and molecular weight cut-off of the functional polysulfone(PSf) ultrafiltration membrane to purify
waste aqueous IPA solutions were measured through the ultrafiltration test. The solute rejection of PSf membrane
had 92% in 1,000ppm aqueous PEG solution with PEG molecular weight 10,000, the molecular weight cut-off
had 10,000.
The IPA concentration on the CMPA-K+ membrane performance using pervaporation module system could be
increased from 95.04 wt% to more than 98.50wt% in about 9hr at operation temperature of 70℃ using the
pervaporation module system. |
| 키워드 |
Membrane, Pervaporation, Flux, Solute rejection, IPA, UF membrane |
| 학회지 |
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| Reference |
http://www.koreascience.or.kr/article/ArticleFullRecord.jsp?cn=OSGGBT_2005_v17n3s82_34 |
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